Contract · Federal · Small Business Set Aside - Total

Atomic Layer Deposition (ALD) Reactor System

Agency: DEPT OF DEFENSE / DEPT OF THE NAVY
Location: Washington, DC
Amount: Amount not listed
Posted: Sep 1, 2026
Set-aside: Small Business Set Aside - Total
NAICS code: 334513 look up NAICS codes
PSC code: 6640

Timeline

Posted

Sep 1, 2026
Status

Closing soon

What contracts like this typically pay

No award history yet for this category (NAICS 334513).

What this contract is for

Agency: DEPT OF DEFENSE / DEPT OF THE NAVY
Location: Washington, DC
Set-aside: Small Business Set Aside - Total
NAICS: 334513
Scope: Federal

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12.

This announcement constitutes the only solicitation.

Offers are being requested and a separate written solicitation will not be issued.

Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes.

This acquisition is set-aside for small business concerns.

This solicitation incorporates provisions and clauses by reference.

The full text of provisions and clauses may be accessed electronically at www.acquisition.gov.

The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9.

See solicitation attachment, below.

Official solicitation and documents

The full solicitation, any attachments, and the actual submission instructions live on the official listing, not on this page. Oppward summarizes public record data; it does not host or mirror the source documents.

View the official listing on SAM.gov

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How to bid on this

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